(The following topics include but are not limited to)
Topic 1: Micro Electro Mechanical Systems
MEMS Design and Simulation
MEMS manufacturing process
MEMS Packaging Technology
Inertial MEMS devices
Optical MEMS devices
RF MEMS devices
Application of Biological MEMS
MEMS reliability
Topic 2: Sensor Devices
Physical quantity sensor
Chemical and Biological Sensors
Gas Sensor Technology
Pressure and flow sensors
Temperature and humidity sensor
Inertial sensor
Smart Sensor
Sensor signal conditioning
Topic 3: Integrated Technology
Sensor and Circuit Integration
Integration of MEMS and CMOS
Heterogeneous Integration Technology
3D integrated packaging
system-level packaging
Integrated microsystem
Integration process compatibility
Integration testing and validation