(Including but not limited to the following topics)
Track 1: Micro-electromechanical Systems
Innovative Structures and Processes of MEMS/NEMS Devices
Integration of Micro-nano Scale Sensors and Actuators
Microfluidic Chips and On-chip Laboratory Systems
RF MEMS and Wireless Sensing Applications
Micro-energy Harvesting and Self-powered Technologies
Breakthroughs in Key Micro-nano Manufacturing Processes
Packaging and Reliability of MEMS Devices
Testing and Characterization Methods for Micro-nano Systems
Standardization and Industrial Ecology in Micro-nano Manufacturing
Exploration of Emerging MEMS Applications
Coupled Simulation Optimization of Multiple Physical Fields
Heterogeneous Integration Technology of MEMS-IC
Track 2: Intelligent Sensing
Fusion of Multi-modal Intelligent Sensors
Flexible Wearable Sensing Systems
Self-calibration and Compensation in Intelligent Sensing
Miniaturized Spectroscopy and Imaging Sensing
Bionic Sensing and Neural Morphological Perception
Distributed Sensing Network Technology
Edge Intelligence Processing of Sensors
Improvement of Sensor Long-term Stability
Intelligent Sensing in Extreme Environments
Sensor Data Security and Privacy
Intelligent Micro-system Integration Platform
Industrial Internet of Things Intelligent Monitoring
Specialized Sensors for Aerospace
Micro-sensing Networks for Environmental Monitoring
Automotive Electronic Micro-system Technologies
Standardization of Intelligent Sensing
Optimization of Sensor Energy Management
Track 3: Materials Technology
Innovative Sensing Materials and Mechanisms
Smart Responsive Materials and Controllable Structures
Applications of Low-dimensional Materials in Micro-nano Devices
Biocompatible and Degradable Materials
Self-repair and Self-adaptive Materials
New Semiconductor Sensing Materials
Multiferroic Materials and Magnetic Devices
Integrated Design of Materials and Devices
High-throughput Calculation and Screening of Materials
Innovative Materials Preparation Processes
New Methods for Characterizing Material Properties
Standardization Research on Functional Materials ......